Aquafine UV systems are trusted by the biggest brands in the microelectronics market
We understand the challenges faced in the design and construction of a system for microelectronics production and have the expertise to help with how to integrate with existing systems and ensure optimal performance.
Aquafine UV systems are used to reduce Total Organic Carbon (TOC).
UV, in combination with ozone, provides a synergistic approach toward the reduction of trace organics which are among the most difficult contaminants to control in a pure water system. As critical dimensions for integrated circuits continue to decrease and transistor capacities continue to increase, contaminants in the parts per trillion ranges can produce yield-impacting defects.
Organics are polar and weakly ionize in ultrapure water. This poses a considerable challenge to ion exchange resins. To prevent TOC leakage from polishing deionizers, silica and/or boron levels are typically monitored to determine when regenerations should be performed.
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